چکیده
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In this study, the electro-mechanical behavior of a specially designed highsensitive piezoresistor pressure microsensor was simulated using finite
element method, through COMSOL multiphysics software. The mechanical
deformation of the diaphragm and the distribution of electrical potential in
the piezoresistive were evaluated for various pressure values. In order to
determine the influence of the temperature sensitivity parameter, different
temperature conditions were investigated. According to the obtained
results, by increase of the applied pressure, the resistance of the
piezoresistor decreased, while, the sensitivity increased. Also, it was
observed that at constant pressure, as the temperature increases, the stress
on the diaphragm surface decreases, indicating high stress distribution at
the sides and the middle of the diaphragm at low temperatures such as
-50 °C. Furthermore, the obtained results demonstrated that temperature
variations were not very effective on the potential distribution in the
piezoresistor. However, the temperature coefficient of sensitivity
demonstrated an increasing tendency with increase of the temperature
from -50 °C to 50 °C.
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